JPH0554706B2 - - Google Patents

Info

Publication number
JPH0554706B2
JPH0554706B2 JP59223666A JP22366684A JPH0554706B2 JP H0554706 B2 JPH0554706 B2 JP H0554706B2 JP 59223666 A JP59223666 A JP 59223666A JP 22366684 A JP22366684 A JP 22366684A JP H0554706 B2 JPH0554706 B2 JP H0554706B2
Authority
JP
Japan
Prior art keywords
vibrator
semiconductor substrate
type
diffusion layers
strain sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59223666A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61100627A (ja
Inventor
Kyoichi Ikeda
Katsumi Isozaki
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP22366684A priority Critical patent/JPS61100627A/ja
Publication of JPS61100627A publication Critical patent/JPS61100627A/ja
Publication of JPH0554706B2 publication Critical patent/JPH0554706B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP22366684A 1984-10-24 1984-10-24 振動式歪センサ Granted JPS61100627A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22366684A JPS61100627A (ja) 1984-10-24 1984-10-24 振動式歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22366684A JPS61100627A (ja) 1984-10-24 1984-10-24 振動式歪センサ

Publications (2)

Publication Number Publication Date
JPS61100627A JPS61100627A (ja) 1986-05-19
JPH0554706B2 true JPH0554706B2 (en]) 1993-08-13

Family

ID=16801745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22366684A Granted JPS61100627A (ja) 1984-10-24 1984-10-24 振動式歪センサ

Country Status (1)

Country Link
JP (1) JPS61100627A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4968198B2 (ja) * 2008-06-25 2012-07-04 トヨタ自動車株式会社 歪み検出装置及び歪み検出方法
CN104934294B (zh) * 2014-03-18 2018-01-30 中国科学院上海微系统与信息技术研究所 一种绝缘体上应变薄膜结构及调节应变薄膜应力的方法
WO2021200569A1 (ja) * 2020-03-31 2021-10-07 太陽誘電株式会社 センサデバイスおよびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer
JPS5944875A (ja) * 1982-09-06 1984-03-13 Nissan Motor Co Ltd 梁構造体を有する半導体装置

Also Published As

Publication number Publication date
JPS61100627A (ja) 1986-05-19

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